ALOXTEC | The wet thermal oxidation of III-V compound semiconductors

BE READY FOR NEXT DEMANDING DATACOM VCSELs/EELs PRODUCTS

The ALOXTEC portfolio covers the full production continuum, from university cleanrooms to high-volume fabs

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ALOX GEN1.4L Auto

A unique and advanced technological solution dedicated to the oxidation phase involved in the manufacture of VCSELs

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Our expertise

A unique and advanced technological solution dedicated to the oxidation phase involved in the manufacture of VCSELs

Contact us
Our expertise

Designed for realizing the wet thermal oxidation of III-V compound semiconductors

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Patented and Proven Technology developed for 15 years

Consumer Electronics & Mobile Devices VCSEL

Real time in-situ optical monitoring

Full control and supervision of machine with two screens and a computer software

Automatic oxidation diameter control until 3 µm

Automatic monitoring software to stop mesa oxidation at targeted operture

Oxide aperture uniformity σ < 0.3 µm on 6” wafer *

Selective oxidation and reproducibility of the process

Run-to-run deviation σ < 0.05 μm *

Best aperture reproductibility for the best yield on the market

Discover the new version of our ALOXTEC equipment

ALOX GEN1.4 Auto & Manual

ALOX GEN1.4 Specifications

Wafer sizes : 3″ to 8″
Selective oxidation process
min-max aperture of <±0.3 µm on 6-inch wafers (with UniformPerf©)
Run-to-run deviation until σ < 0.1 μm (with UniformPerf©)
Tight flow control of moisturized gas : 0,6 to 30 g/h
Vacuum atmosphere : <10 to 800 mbar absolute
Stabilized temperature 350°C to 600°C
Full control / supervision of machine
Programming of recipes
Automatic monitoring software to stop mesa oxidation attargeted aperture (option)

* For common results, depending on wafer

Views of oxidation process over time

VCSEL Oxidation in a Aloxtec's ALOX 1.4 - step 1

VCSEL Oxidation in a Aloxtec's ALOX 1.4 - step 2

VCSEL Oxidation in a Aloxtec's ALOX 1.4 - step 3

VCSEL Oxidation in a Aloxtec's ALOX 1.4 - step 4

Applications

ALOX furnaces support photonics manufacturers from R&D to high-volume production.

VCSEL/EEL

The vertical-cavity surface-emitting laser, or VCSEL/EEL is a type of semiconductor laser diode. VCSEL/EEL applications include fiber optic communications, precision sensing, computer mice and laser printers.

Laser Diodes

A laser diode is a semiconductor device. Wide range of uses that include fiber optic communications, barcode readers, laser pointers, laser printing, laser scanning and light beam illumination.

Waveguides

A waveguide is an optical structure that directs the electromagnetic waves of an optical spectrum. Widely used in : optical fiber communication, photonic integrated circuits, and optical interferometers.