• VCSEL & EEL wet thermal oxidation

    BE READY FOR NEXT DEMANDING DATACOM VCSELs/EELs PRODUCTS

     

    The ALOXTEC portfolio covers the full production continuum, from university cleanrooms to high-volume fabs

     

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  • ALOX GEN1.4L Auto

     

    A unique and advanced technological solution dedicated to the oxidation phase involved in the manufacture of VCSELs

     

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  • ALOX GEN1.4 Manual Light R&D wet oxidation furnace with UniformPerf technology
    Our expertise

     

    A unique and advanced technological solution dedicated to the oxidation phase involved in the manufacture of VCSELs

     

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  • Vcsel in Aloxtec's ALOX 1.4
    Our expertise

     

    Designed for realizing the wet thermal oxidation of III-V compound semiconductors

     

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Patented and Proven Technology developed for 15 years​

Consumer Electronics & Mobile Devices VCSEL

Real time in-situ optical monitoring

Wafers

Automatic oxidation diameter control until 3 µm

Wafer in Aloxtec's ALOX 1.4

Oxide aperture uniformity σ < 0.3 µm on 6” wafer *

Wafer

Run-to-run deviation σ < 0.05 μm *

Discover the new version of our ALOXTEC equipment

 

ALOX GEN1.4L Manual & ALOX GEN1.4L Auto

ALOX GEN1.4 Specifications

 

  • Wafer sizes : 3″ to 8″
  • Selective oxidation process
  • min-max aperture of <±0.3 µm on 6-inch wafers (with UniformPerf©)
  • Run-to-run deviation until σ < 0.1 μm (with UniformPerf©)
  • Tight flow control of moisturized gas : 0,6 to 30 g/h
  • Vacuum atmosphere : <10 to 800 mbar absolute
  • Stabilized temperature 350°C to 600°C
  • Full control / supervision of machine
  • Programming of recipes
  • Automatic monitoring software to stop mesa oxidation attargeted aperture (option)

* For common results, depending on wafer

Views of oxidation process over time

VCSEL Oxidation in a Aloxtec's ALOX 1.4 - step 1
VCSEL Oxidation in a Aloxtec's ALOX 1.4 - step 2
VCSEL Oxidation in a Aloxtec's ALOX 1.4 - step 3
VCSEL Oxidation in a Aloxtec's ALOX 1.4 - step 4

Applications

ALOX furnaces support photonics manufacturers from R&D to high-volume production.

 

VCSEL & EEL wet thermal oxidation

 

VCSEL/EEL

 

The vertical-cavity surface-emitting laser, or VCSEL/EEL is a type of semiconductor laser diode. VCSEL/EEL applications include fiber optic communications, precision sensing, computer mice and laser printers.

Laser Diodes

 

A laser diode is a semiconductor device. Wide range of uses that include fiber optic communications, barcode readers, laser pointers, laser printing, laser scanning and light beam illumination.

Waveguides

 

A waveguide is an optical structure that directs the electromagnetic waves of an optical spectrum. Widely used in : optical fiber communication, photonic integrated circuits, and optical interferometers.