通过双屏幕和计算机软件对机器进行全面控制和监控
用于在目标温度下阻止晶圆氧化过程的自动监测软件
选择性氧化及其工艺的重复性
业界最佳的光圈重现性，实现最高良率
* 对于常见结果，具体取决于晶圆
The universities of Berkeley in USA, and of Cardiff in Wales/UK agreed to let us use their ALOX system for demonstrations. On the process part, we benefit from the technological and scientific support granted by our CNRS/LAAS consultant.
The Laboratory of Analysis and Architecture of Systems (LAAS) is a CNRS research unit linked with the Institute for Engineering and Systems Sciences (INSIS) and the Institute of Information Sciences and their interactions (INS2I).
The Marvell NanoLab, located in the CITRIS headquarters building, Sutardja Dai Hall , includes more than 15,000 sq feet of Class100 and Class1000 cleanroom.
KTPs provide knowhow and funding that can help organisations break free from established ways of working to experience new ideas and processes that boost performance and cut costs.
垂直腔面发射激光器（VCSEL/EEL）是一种半导体激光二极管。VCSEL/EEL 的应用领域包括光纤通信、精密传感、电脑鼠标和激光打印机。
激光二极管是一种半导体器件。其应用范围广泛，包括光纤通信、条形码扫描仪、激光笔、激光打印、激光扫描以及光束照明。
波导是一种能够引导光谱中电磁波的光学结构。广泛应用于：光纤通信、光子集成电路和光学干涉仪。
主要展会
