Automated VCSEL Oxidation Furnace

ALOX GEN1.4L Auto

For prod & multiple products dev

The ALOX GEN1.4L Auto is the newest addition to the ALOXTEC portfolio: an equipment that combines the compactness and characterization richness of the ALOX GEN1.4L Manual with automated wafer loading and a groundbreaking process innovation that redefines uniformity standards for wet thermal oxidation.

60+ tools used worldwide in 21 customers sites
Support and Sales representatives in EU, Asia & US

Technical specifications of the ALOX GEN1.4L Auto

Specification	Value
Throughput	800–1000 wafers/month
Wafer sizes	3” to 8”
Loading	Automatic wafer loading SECS/GEM connectivity Fully automatic mode (production tools)
Process window	Temperature 350°C to 600°C Pressure few mbar to 800 mbar Water flow 0.6 to 30 g/h
With UniformPerf© (factory option or field upgrade)	σ < 0.1 µm min-max < ±0.3 µm on 6’’
Without UniformPerf©	σ <0,25 µm min-max < ±0.6 µm on 6’’ wafers
4 in 1 capability	Automatic loading & unloading + Oxidation + Characterization + Annealing in a single cycle
Low W2W dev.	σ < 0.05 µm on 6” wafers
Proprietary vision system	In situ live vision Automatic “stop on right oxidation diameter” Aperture target until < 3 µm X/Y/Z motion with full wafer view 2 cameras (low and high magnification) Monochromator capability included
High homogeneity chamber	Anti bow system Several heating zones control 1 gas lines for optimised reliability
Supervision and vision software	User friendly interface Automatic pattern recognition Automatic process & measurement algorithms

The best « all in 1 » solution for high-performance VCSELs oxidation

The 2026 innovation: rotation and in-situ measurement during oxidation

For the first time in wet thermal oxidation, the ALOX GEN1.4L Auto introduces wafer rotation during the oxidation phase. This innovation optimizes oxidation uniformity across the wafer by precisely controlling local temperature and water vapour gradients within the furnace chamber, ensuring consistent oxidation rates across all areas.

By rotating the wafer during oxidation, the ALOX GEN1.4L Auto averages out these gradients across the full wafer surface. In addition, ALOXTEC’s proprietary in-situ vision system continues to operate and provide real-time measurements throughout the rotation: a technical achievement that represents a world first in the field.

Innovative and proven ‘Stop on exact aperture size’ automated process prior to in-line & real time vision system.

The ALOX GEN1.4L Auto delivers outstanding uniformity, with aperture variation staying within σ < 0.25 µm on 6″ (without our UniformPerf© option), and a Run-to-Run average oxidation aperture under 0.2 µm. Its innovative ‘Stop on exact aperture size’ automated process, combined with an in-line real-time vision system, ensures a highly repeatable and controlled oxidation — proven across the full range of EPI complexity, from 3 to several hundred epitaxial layers.

Full process capacitance and control on Pressure (from few mbar to PA), Temperature (up to 600°C) and Waterflow (from 5g/h to 100g/h)

The ALOX GEN1.4L Auto offers full process control over the three critical parameters of thermal oxidation: pressure (from a few mbar to atmospheric), temperature (up to 600°C), and water vapor flow (5 g/h to 100 g/h). Multi-zone heating architecture compensates for EPI wafer-to-wafer variability, while low-pressure process capability combined with in-situ annealing ensures high-reliability oxide layers. This complete parametric control enables precise shaping of mesa geometries to meet the most demanding VCSEL device specifications.

Best industrial TCO of the market

Designed for both R&D and high-volume production environments, the ALOX GEN1.4L Auto supports wafer formats from 3″ to 8″ with an industrial throughput of up to 1000 wafers per month, directly impacting yield and time-to-market. As a 3-in-1 equipment integrating Oxidation, Annealing, and Characterization in a single tool, it significantly reduces CAPEX and OPEX footprint. The equipment features a user-friendly HMI, full SECS/GEM connectivity, and flexible loading modes — manual or automatic — backed by local support, spare parts availability, and dedicated training services.